1. Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
پدیدآورنده : / by Christopher L. Borst, William N. Gill, Ronald J. Gutmann
کتابخانه: Campus International Library of Kish University of Tehran (Hormozgan)
موضوع : Interconnects (Integrated circuit technology),Semiconductors -- Polishing,Grinding and polishing,Chemical mechanical planarization
